Measurement Application in Micro-Structure with Reformed Fringe Projection Mircoscope

碩士 === 國立臺北科技大學 === 光電工程系所 === 93 === Due to the progression in semiconductor manufactures, it is a trend that various products become tiny and fine. Measurement Orientation and measurement calibration technologies applied in tiny objects are developing. This article is discussing the application of...

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Bibliographic Details
Main Authors: Chen-Tien Hung, 黃振添
Other Authors: 林世聰
Format: Others
Language:zh-TW
Published: 2005
Online Access:http://ndltd.ncl.edu.tw/handle/5e7b7r