CMOS Compatible Contact Mode RF MEMES Variable Inductor
碩士 === 國立臺北科技大學 === 機電整合研究所 === 93 === This thesis presents a variable inductor by using CMOS processes and extra post-process techniques of MEMS. Contact mode variable inductor consists of voltage-control actuator and stationary electrode, such as inductor. The voltage-control actuator is cantileve...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/but6b5 |