Micro Force Sensors of 50μm Size Fabricated by Standard CMOS Foundry and Post Process
碩士 === 淡江大學 === 機械與機電工程學系碩士班 === 93 === This work investigates the fabrication of a piezoresistive micro pressure sensor with the size of 50μm×50μm using the standard CMOS and post process. The CMOS foundry, TSMC 0.35μm 2P4M process herein, is provided by CIC (Chip Implementation Center), Taiwan. Th...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/35253908933659605369 |