The Thermo-buckled Type Actuators Fabricated by Parylene MEMS Technology
碩士 === 淡江大學 === 機械與機電工程學系碩士班 === 93 === According to the characteristics of parylene, this thesis describes a new type of parylene micropump using the principle of thermo buckling. We first deposit the 1st layer of parylene C on the substrate wafer. Then, we use the photoresist AZ4620 as the sacrifi...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/82058398058108283401 |