Study of MgO Thin Film Grown by RF-sputter in Application of Secondary Electron Emission
碩士 === 大同大學 === 光電工程研究所 === 93 === Our purpose is to deposit MgO films by reactive R.F. sputtering deposition, we completed the dynode devices on INVAR substrates. Then the secondary electron emission yield of MgO film were measurement on the dynode structures. We successfully demonstrated that prim...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2005
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Online Access: | http://ndltd.ncl.edu.tw/handle/59216043773875236138 |