Optical properties of the amorphous Al2O3-TiO2 composite film for H-T APSM at 193nm wavelength
碩士 === 大同大學 === 材料工程學系(所) === 93 === Amorphous (Al2O3)x-(TiO2)1-x composite films are prepared using R.F. unbalanced magnetron sputtering in an atmosphere of argon and oxygen at room temperature. (Al2O3)x-(TiO2)1-x composite films are completely oxidized using an O2/Ar flow rate ratio of 2.0. The op...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/33181571277689103256 |