Study on Adhesion Effects of Silicon-Containing Organic Interlayer for Diamond-Like Carbon Film with Metallic Substrates by Plasma Enhanced Chemical Vapor Deposition
碩士 === 大同大學 === 材料工程學系(所) === 93 === This study was deposited silicon-containing interlayer and surface plasma treated to improve diamond-like carbon’s defect of applications by plasma enhanced chemical vapor deposition. Due to diamond-like carbon films have excellences in physic and chemical proper...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/z7xeah |