The Study on the application of gas sensing by Carbon nanotubes
碩士 === 國立雲林科技大學 === 電子與資訊工程研究所 === 93 === The vertically aligned carbon nanotubes (CNTs) deposited by microwave plasma-enhanced chemical vapor deposition (MPCVD) were utilized as resistive gas sensors. The carbon nanotubes were annealed at 200℃ under N2 flow (500 sccm) for 15 minute. After that, t...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Online Access: | http://ndltd.ncl.edu.tw/handle/01499780920237047183 |