Research on manufacturing and polishing processes of the micro-structure array
碩士 === 國立雲林科技大學 === 機械工程系碩士班 === 93 === This thesis focused on the manufacturing of the multi micro-electrodes, the shaping of the micro-holes, and their accuracy and efficiency. The fabricating method is based on micro-EDM to produce multi micro-electrodes and holes (10~100 u m) with high quantitie...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/31350199214246687432 |