Research on manufacturing and polishing processes of the micro-structure array

• Main Authors: LIU. CHCIEN HUNG, 劉建宏
• Other Authors: Chia-Lung Kuo
• Format: Others
• Language: zh-TW
• Published: 2005
• Online Access: http://ndltd.ncl.edu.tw/handle/31350199214246687432

碩士 === 國立雲林科技大學 === 機械工程系碩士班 === 93 === This thesis focused on the manufacturing of the multi micro-electrodes, the shaping of the micro-holes, and their accuracy and efficiency. The fabricating method is based on micro-EDM to produce multi micro-electrodes and holes (10~100 u m) with high quantities and different 3D shapes. It was observed that the multi microelectrodes and holes of high density, high accuracy, high efficiency, and high hardness could be fabricated by using selected machining parameters and high accuracy machine tools. Several advantages have been obtained through this work: 1. Improve the manufacturing speed of the traditional micro-EDM process whose throughput of the traditional process is limited by its serial manufacturing process, 2. Increase the machining accuracy by forming and shaping micro-electrodes and holes on the same machine. 3. Achieve manufacturing multi micro-electrodes and holes of high density and high aspect ratio. 4. Achieve shaping complex three dimensional micro punches and mold holes by utilizing the Ultrasonic Vibration enlarge function of EDM process.