The Microstructure and Magnetic Properties of Nd-Fe-B thin film sputtered by pure elemental targets
碩士 === 國立雲林科技大學 === 機械工程系碩士班 === 93 === This study investigated the microstructure and magnetic properties of NdFeB thin films deposited at various Iron sputtering power from 60 to 180 watts by four single element targets and post-annealed at temperature from 400℃~800℃. The Ti/NdFeB/Ti films were de...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/00004050849210697938 |