Using APS Simulation Model to Improve the Wafer Fabrication Production System
碩士 === 元智大學 === 工業工程與管理學系 === 93 === In wafer fabrication, the queue time consumed most of the cycle time. The APS simulation model was developed to support the wafer fabrication automation production system as an efficiency solution. In this study, the AutoSched APTM was used as simulati...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/57708332483381602641 |