On-line Tuning System of dMEWMA Control Using a Neural Network Approach
碩士 === 元智大學 === 工業工程與管理學系 === 93 === The double EWMA (exponentially weighted moving average) controller is a popular algorithm for on-line quality control of semiconductor manufacturing. The performance of the closed-loop system depends on proper choice of the two weight matrices of the double EWMA...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/64985054218851798809 |