The Edge Effects on the Residual Stresses in a Thin Film/Substrate System
碩士 === 元智大學 === 機械工程學系 === 93 === During an epitaxial process, misfit strains due to the mismatch of coefficient of thermal expansion (CTE) are developed in the film and the substrate, leading to lattice mismatch and dislocation movement as well as residual stresses. A finite element analysis (FEA)...
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| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/06410969001466564960 |