鎳金屬誘發非晶矽薄膜再結晶行為研究
碩士 === 國防大學中正理工學院 === 兵器系統工程研究所 === 94 === The processes commonly used to fabricate poly-silicon (poly-Si) thin films by recrystallization technique can roughly be categorized as Solid Phase Crystallization (SPC)-- superior in achieving film crystallinity, Metal-Induced Crystallization (MIC)-- relat...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/02365008912630461166 |