微波諧振器之聲波布拉格鏡效能提升研究

碩士 === 國防大學中正理工學院 === 電子工程研究所 === 94 === ABSTRACT The structure of a Bragg Mirror in an FBAR is composed of thin films with alternate high and low acoustic impedance, and the thicknesses of the films are quarter of an acoustic wavelength. To reduce the parasitic capacitance in the devices, this wo...

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Bibliographic Details
Main Authors: LE-YE TANG, 湯禮儀
Other Authors: 桂平宇
Format: Others
Language:zh-TW
Published: 2006
Online Access:http://ndltd.ncl.edu.tw/handle/69820260553319969839