The analysis of the heat transfer characteristic between the wafer and the pedestal in semi-conductor manuafacturing
碩士 === 國立中正大學 === 機械工程所 === 94 === Single-wafer processing has been the main stream in semiconductor, micro, and nano-component manufacturing. Similar process sequence and procedures are also widely applied to large-scale substrates such as the Thin-Film-Transistor Liquid-Crystal Display (TFT-LCD) p...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/90415386096210475703 |