An Intelligent Scheduling System for Semiconductor Manufacturing
博士 === 國立中正大學 === 電機工程所 === 94 === The development of scheduling strategies for the new dedicated photolithography machine constraint of the semiconductor manufacturing systems is the main objective of this research. The scheduling of the complicated semiconductor manufacturing systems has been stud...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Online Access: | http://ndltd.ncl.edu.tw/handle/88937404603026028691 |