Reactive sputtering gadolinium oxide membranes for pH sensors and improved by rapid thermal annealing
碩士 === 長庚大學 === 電子工程研究所 === 94 === The ion-sensitive filed-effect transistor (ISFET) was first proposed by P. Bergveld in 1970. The ISFETs have been studied extensively. The advantages of ISFET are small size, low cost, high input impedance, low output impedance and rapid response over conventional...
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| Format: | Others |
| Language: | zh-TW |
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2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/10353430846381612623 |