Analysis of ZnO Thin Films and Manufacture of ZnO LED
碩士 === 中華技術學院 === 電子工程研究所碩士班 === 94 === This research mainly discusses DC magetron sputter（Zn target） and RF magetron sputter（ZnO target） and the deposition of the zinc oxide thin films on different substrates. This research uses the different gas and the ratio of Ar/（Ar+O2） to deposite P-ZnO thin f...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/17820711204919088364 |