The Study of Plasma Etching on SiC Materials and Micro-mold Fabrication

碩士 === 中華大學 === 機械與航太工程研究所 === 94 === The market demand for high temperature micro-molds is growing rapidly recently. The most important requirements for high temperature micro-molds include high temperature strength and toughness, low thermal expansion coefficient and anti-stick properties. The Si...

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Bibliographic Details
Main Authors: Chien Hung Kuo, 郭建煌
Other Authors: Hsi-Hsin Chien
Format: Others
Language:zh-TW
Published: 2006
Online Access:http://ndltd.ncl.edu.tw/handle/98652394493169963622