Apply the Minimum Variance Controller to Hard-Coat of Disc Process
碩士 === 中華大學 === 機械與航太工程研究所 === 94 === The purposes of this study are to construct the process model and develop a spin coating process controller for the spin-coat process. The spin coating process model, the foundation of the process controller, is constructed by design of experiment (DOE). In ord...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/89794303674146517209 |