Fabrication of SiOX Barrier Coatings Using Plasma Enhanced Chemical Vapor Deposition
碩士 === 中原大學 === 化學工程研究所 === 94 === Organic light-emitting diode (OLED) displays require perfect encapsulation against inward permeation of water and oxygen. In order to reduce the rate of permeation of vapors through OLED devices, a barrier layer is needed. SiOX film is a potential candidate for OLE...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/66693842407997078394 |