Investigation and Analysis of Harmonics in a Wafer Foundry

碩士 === 中原大學 === 電機工程研究所 === 94 === Power quality has great influence on high tech and precision industries. The power system is often polluted by harmonics. And harmonics are produced from non-linear load. These non-linear load pollutions usually cause voltage distortions that lead to equipment malf...

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Bibliographic Details
Main Authors: Shin-Ming Huang, 黃信銘
Other Authors: Ying-Yi Hong
Format: Others
Language:zh-TW
Published: 2006
Online Access:http://ndltd.ncl.edu.tw/handle/61570883998594722582