Fault Detection and Classification of PECVD equipment Using Wavelet Transform
碩士 === 中原大學 === 機械工程研究所 === 94 === The plasma-enhanced chemical vapor deposition (PECVD) process has been developed for thin film deposition in the semiconductor and TFT-LCD industries for decades. During the process, plasma plays an important role to the success of deposition. It is generated by RF...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/66305584643975763701 |