White-Light Interferometric Techniques in Micro-Structure Measurement
碩士 === 清雲科技大學 === 機械工程研究所 === 94 === With the progress of nanometer technology, the traditional 2D profilometry techniques are unable to satisfy the accurate measurement and demands; thus, the demands of nanometer 3D full-filed measurement for surface metrology are gradually increasing. Because the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/63331059519940085139 |