Etching Study of GaN by Photoelectrochemical Reaction Method
碩士 === 大葉大學 === 電機工程學系碩士班 === 94 === In this thesis, wet etching of GaN by photoelectrochemical (PEC) technique was investigated and applied to the fabrication of light emitting diodes. In order to develop a suitable wet etching process for the device fabrication, studies of wet etching of GaN inclu...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/75395518482587830677 |