Development of Electrostatic (Langmuir) Probe for Characterization of RF ICP Plasma
碩士 === 逢甲大學 === 產業研發碩士班 === 94 === Electrostatic (Langmuir) probes are the best way to achieve the real-time quality control. With the semiconductor process is development into deep sub-micron scale, the role of plasma process technology played in this industry is more unable to be substituted. Th...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/47151789697307544635 |