Implementation of Surface Characteristics Measuring System for Optical Thin Films
碩士 === 逢甲大學 === 產業研發碩士班 === 94 === We proposed a measurement system for the surface characteristics of the optical thin films including the relative surface flatness, thickness, surface contour and internal stress. The experimental technique was based on the Twyman-Green interferometry. The wavelets...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/20711570854427585275 |