Effect of the second cold arm on deformation and stress of micro electro-thermal actuator
碩士 === 逢甲大學 === 機械工程學所 === 94 === Devices of Micro-electro-mechanical System (MEMS) include microactuators, microsensors and their transducers. Where, the microactuators drive the whole system and enable the system to operate effectively. Electro-thermal actuators are one of the most important micro...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/64913966683250396315 |