Fabrication of Optical Monitoring System with Vertical and Oblique Incidence
碩士 === 輔仁大學 === 物理學系 === 94 === The study is an optical monitoring method for depositing optical thin films. In general, a quartz monitor and an optical monitor are used to control thickness in deposition process. The quartz monitor indicates and controls the physical thickness of the thin film that...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/42250850621321657408 |