CMP of Green Production
碩士 === 崑山科技大學 === 機械工程研究所 === 94 === Increasing awareness of environmental protection has promoted the 4 R concepts in manufacturing. The 4Rs are reduce, reuse, recycle, and recovery. If the life of slurry can be extended in the CMP process, amount of chemical waste can be reduced. In the Preston eq...
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| Format: | Others |
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2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/32740254121964794596 |