Study on Various Materials of Mold Insert for the Processing of Microfluidic Chip
碩士 === 龍華科技大學 === 機械系碩士班 === 94 === This study uses the microfluidic chip as example to discuss the materials of mold insert on hot embossing molding. For the mold insert, firstly, this study uses the SU-8 photoresist to coat on the silicon wafer, and then uses the UV light to expose the pattern on...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/18148139076491314650 |