Applying Artificial Neural Network in the EDC of machine and WAT model for the DRAM manufacture
碩士 === 明志科技大學 === 工程管理研究所 === 94 === The semiconductor manufacturing process surpassed 500 stages of one, which include thousands of influential parameters. With regards to monitor and improvement of manufacturing process in practice, we have simultaneously to consider these parameters relation and...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/6vu2v7 |