Electroluminescence from nc-SiNX:H
碩士 === 中興大學 === 電機工程學系所 === 94 === Abstract In this thesis, we design three experiments. The amorphous silicon nitride (SiNX) films were deposited by plasma-enhanced chemical vapor deposition (PECVD), while the RF power, deposition conditions of pressure, substrate temperature, and diluting gas Ar/...
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/65373399843976873673 |