A study of MEMS-Type Condenser Microphone Using Wafer Transfer Technique
碩士 === 國立中興大學 === 精密工程學系所 === 94 === In this work, the MEMS and semiconductor techniques to develop a new acoustic sensor, that condenser microphone was investigated. Our study mainly includes two parts：one is the design and simulation of MEMS condenser microphone and the other is the fabrication an...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/60322533301171857378 |