Fabrication of micro-hollow cathode electrode and its discharge characteristics
碩士 === 國立成功大學 === 化學工程學系碩博士班 === 94 === The use of low pressure plasma related to the plasma enhanced synthesis and surface modification of materials (deposition, surface functionalization, etching) requires complex and expensive vacuum systems. However, atmospheric-pressure discharges offer a route...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/78652369261672740405 |