Simulation of Topography and Microstructure for Sputtered Films
碩士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 94 === With the increasing integration and the shrinking size of devices on chips, the uniformity and microstructure of sputtered films become critical for the reliability and physical properties of devices. With the simulation of sputter deposition, we can stud...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/81144619375528038773 |