The study of plasma diagnostics and photo-resist stripping using multi-functional microwave plasma system
碩士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 94 === This study utilized Langmuir probe as a plasma diagnostic tool to monitor the effect of plasma generation depending on several parameters such as the generation power and the distance along with the glow discharge region. Optical Emission Spectrometry (OES)...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/00491607255724880608 |