Characteristic of ZnO transparent conducting oxides and their application to GaN Schottky barrier diodes
碩士 === 國立成功大學 === 光電科學與工程研究所 === 94 === In this study, undoped ZnO and boron-doped ZnO(BZO) films were deposited on sapphire by means of an magnetron sputtering method. The BZO films were prepared by cosputtering of ZnO and B2O3 targets. The as-deposited ZnO films exhibited a high-resistivity proper...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/35103443593752276600 |