Determination of Tool Availability Portfolio for Semiconductor Fabs
碩士 === 國立交通大學 === 工業工程與管理系所 === 94 === This research proposes an approach to optimize the determination of tool availability for semiconductor fabs. A semiconductor fab is consisting of many tool groups. The performance of a semiconductor fab highly depends on the availability of tool groups in fabs...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/54044512461732686616 |