Determination of Tool Availability Portfolio for Semiconductor Fabs

• Main Authors: Shao-Han Lin, 林劭函
• Other Authors: Muh-Cherng Wu
• Format: Others
• Language: zh-TW
• Published: 2006
• Online Access: http://ndltd.ncl.edu.tw/handle/54044512461732686616

碩士 === 國立交通大學 === 工業工程與管理系所 === 94 === This research proposes an approach to optimize the determination of tool availability for semiconductor fabs. A semiconductor fab is consisting of many tool groups. The performance of a semiconductor fab highly depends on the availability of tool groups in fabs. Therefore, maintaining the availability of tool groups is very important. This research aims to identify an optimal tool availability portfolio under the following scenario. The objective function is to maximize the revenue of a fab subject to a target cycle time constraint. The solution approach involves two main modules. First, we use a queueing network model to evaluate the performance of a tool portfolio. Secondly, we use a genetic algorithm (GA) as well as a marginal allocation (MA) algorithm to find a near-optimal tool portfolio. Experiment results indicate that the GA method outperforms the MA method at an acceptable computation time requirement.