The Identification System of Wafer Defects Clustering Patterns Constructed by Artificial Neural Network
碩士 === 國立交通大學 === 工業工程與管理系所 === 94 === Being a semiconductor manufacturer, knowing how to improve the yield of wafer production has been regarded as the focus. However the causes of yield problems have much to do with the total number of defects on a wafer and defects clustering phenomenon. As the w...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/06726075683928110634 |