Constructing an Adaptive Control Process for Clustered Defects on Wafers
碩士 === 國立交通大學 === 工業工程與管理系所 === 94 === Number of defects on a wafer is a key factor of wafer yield. The Integrated-circuits(IC) manufacturers often adopt c-chart to monitor the wafer defects. The traditional sampling scheme is to sample just one wafer per lot, therefore c-chart can only monitor the...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/23005653831961229745 |