Grating displacement interferometry
博士 === 國立交通大學 === 光電工程系所 === 94 === This thesis presents a planar diffractive laser encoder system (PDLENS), which serves as a two-dimensional position detection apparatus for precision machine applications with a measuring resolution of 1 nm. Traditional two-dimensional position detection uses a p...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/23980817607731866022 |