Design and Fabrication of Bi-Stable Electrostatic Actuator for Optical Switches
碩士 === 國立交通大學 === 工學院碩士在職專班精密與自動化工程學程 === 94 === This study has designed and fabricated electrostatic microactuators for 2x2 optical switches respectively with low drive voltages of 18.7V and 24.8V, and switching speed at 0.8ms and 1.1ms that are faster than other electrothermal type 2x2 optical swi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/38027049798997986200 |