The Practice of Saving Power Consumption by Chiller Systemin 12 inch Fab

碩士 === 國立交通大學 === 工學院碩士在職專班精密與自動化工程學程 === 94 === This project attempted to manipulate the controllable settings of a chiller system, without changing its architecture, thus reducing the total chiller system costs. The controllable settings were the chiller operation, cooling tower running settings a...

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Bibliographic Details
Main Authors: Ching-Chao Yang, 楊景超
Other Authors: Wu-Shung Fu
Format: Others
Language:zh-TW
Published: 2006
Online Access:http://ndltd.ncl.edu.tw/handle/73274117483246655851