Fabrication and Characterization of Novel Structure with Nano-Scale Low-Temperature High-Performance Polysilicon Thin-film Transistors
博士 === 國立交通大學 === 電子工程系所 === 94 === In first part, we study the electrical characteristics of a series of polysilicon thin-film transistors (poly-Si TFTs) with different numbers of multiple channels of various widths, with lightly-doped drain (LDD) structures. Among all investigated TFTs, the nano-s...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/uu26ku |