Removal of white smoke from the exhaust of the wet-etch process in a TFT-LCD factory
碩士 === 國立交通大學 === 工學院碩士在職專班產業安全與防災學程 === 94 === In TFT-LCD manufacturing factories, the chemicals that are used in the wet-etching equipments generate acidic waste gases consisting of nitric、acetic and phosphoric acids. The acidic gases are introduced into the acidic wet scrubber via the acidic exha...
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| Format: | Others |
| Language: | zh-TW |
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2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/89959764019016807778 |