Modeling and Simulation of the MES-Controlled Wafer Fabrication Process
碩士 === 國立中央大學 === 工業管理研究所 === 94 === This paper presents a model and simulation for analyzing Manufacturing Execution System (MES) in semiconductor fab, which aims to optimize production activities on the shop floor in a changing environment. Despite the large number of studies that have been done o...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/95zf9v |